Apparatus and method for applying a bias voltage to a MEMS device based on a variable reference signal

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United States of America Patent

PATENT NO 12095390
APP PUB NO 20230113827A1
SERIAL NO

17959310

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Abstract

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A PM signal generator can generate a variable PM signal based on a position of a movable element of a MEMS motor. A bias voltage generator can provide a bias voltage to the MEMS motor. The bias voltage generator can include a reference signal generator that can generate a reference signal that varies based on variation of pulses of the PM signal. The bias voltage can be based on the reference signal.

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Patent Owner(s)

Patent OwnerAddress
KNOWLES ELECTRONICS LLC1151 MAPLEWOOD DRIVE ITASCA IL 60143

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Toft, Jakob Kenn København, DK 3 3

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