Stage device and substrate processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America
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Sep 17, 2024
Grant Date -
N/A
app pub date -
Jun 30, 2021
filing date -
Jun 30, 2021
priority date (Note) -
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Abstract
A stage device includes: a stage having a pin hole provided therein and a placement surface on which a substrate is placed; and at least one lift pin configured to move up and down through the pin hole; and a lifter configured to raise and lower the at least one lift pin, wherein the stage includes a first heating part provided therein and configured to heat the stage, and the at least one lift pin includes a second heating part provided therein or therearound and configured to heat the at least one lift pin.
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