System comprising an aperture and a dispersing element for applying electromagnetic radiation onto a source material, and method for aligning an aperture

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United States of America Patent

PATENT NO 12094621
APP PUB NO 20240047092A1
SERIAL NO

17642015

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Abstract

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The present invention relates to an aperture (10) for electromagnetic radiation (100), preferably electromagnetic radiation (100) comprising a wavelength between 1 nm and 20 μm, comprising an aperture body (20) made of a body material (22) transparent for the electromagnetic radiation (100). Further, the present invention relates to a method for aligning an aperture (10), and additionally to a system (70) for applying electromagnetic radiation (100) onto a source material and a dispersing element (90) for such a system (70).

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Patent Owner(s)

Patent OwnerAddress
MAX-PLANCK-GESELLSCHAFT ZUR FORDERUNG DER WISSENSCHAFTEN E VHOFGARTENSTRASSE 8 MÜNCHEN 80539

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Braun, Wolfgang Bietigheim-Biss, DE 74 225
Wanke, Robin Stuttgart, DE 12 1

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