Safety system for needle probe card for high-voltage and high-current test on power semiconductor devices, related test machine and corresponding testing method
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United States of America Patent
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Sep 17, 2024
Grant Date -
Mar 9, 2023
app pub date -
May 27, 2021
filing date -
May 27, 2020
priority date (Note) -
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Abstract
A safety system for a needle probe card for test machines for high-voltage and high-current testing of power semiconductor electronic devices is provided. The needle probe card has a plurality of needles adapted to be placed in contact with a device under test (DUT), each needle being configured to allow a flow of electric current. The safety system has a control unit capable of determining the electric current flowing in every single needle, and a plurality of switching devices configured to selectively interrupt the electric current flowing in the needles. At least one switching device is associated with each needle of the needle probe card. The control unit is configured to drive every single switching device to selectively interrupt the flow of electric current in a corresponding needle.
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