Optical detection system and alignment method for a predetermined target object

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United States of America Patent

PATENT NO 12092658
APP PUB NO 20230058964A1
SERIAL NO

17871978

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Abstract

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An optical detection system and an alignment method for a predetermined target object are provided. The optical detection system includes a chuck stage, an optical detection module, a vision inspection module and a control module. The chuck stage includes a chuck configured for carrying a plurality of predetermined objects to be tested. The optical detection module includes an optical probe device, and the optical probe device is configured to be disposed above the chuck for optically detecting the predetermined object. The vision inspection module includes an image capturing device and an image display device. The image capturing device is configured for capturing a real-time image of the predetermined object in real time, and the image display device is configured for displaying the real-time image of the predetermined object in real time. The control module is configured to execute the alignment method for the predetermined target object.

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Patent Owner(s)

Patent OwnerAddress
MPI CORPORATIONNO 155 ZHONGHE ST ZHUBEI CITY HSINCHU COUNTY 30267

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Giessmann, Sebastian Hsinchu County, TW 16 13
Ting, Po-Yi Hsinchu County, TW 3 1

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