Non-destructive inspection and manufacturing metrology systems and methods
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United States of America Patent
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Sep 17, 2024
Grant Date -
Jul 21, 2022
app pub date -
May 22, 2020
filing date -
May 23, 2019
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Abstract
Measuring or inspecting samples through non-destructive systems and methods. Multiple light pulses emitted from a light source. The light pulses are split into pump pulses and probe pulses. A first probe pulse reaches the surface of a sample after a first time duration after a first pump pulse reaches the surface. A second pump pulse reaches the surface after a time duration after the first probe pulse. When the second pump pulse reflects off the sample, the second pump pulse may be altered by an acoustic wave generated by the first probe pulse. The reflected second pump pulse may be analyzed to determine a characteristic of the sample.
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