Multi-modal pressure sensor
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United States of America
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Sep 17, 2024
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Apr 14, 2023
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Apr 14, 2023
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Abstract
The subject invention is concerned with systems and methods advantageously applying finite element analysis to establish design rules for a highly sensitive piezo-resistive pressure sensor with an output that is high enough to be detectable by simple and inexpensive circuits and therefore ensure wearability. Four frequently reported micro-feature shapes in micro-patterned piezo-resistive sensors are provided, where the micro-dome and micro-pyramid yield the highest sensitivity. Investigations of different conductivity values of micro-patterned elastomers show that coating the elastomer with a conductive material (e.g., a metallic coating) leads to higher current response when compared to composited conductive elastomers. Advantageous geometric parameters and spatial configurations of micro-pyramid design of piezo-resistive sensors are provided. Results show that an enhanced sensitivity and higher current output can be achieved by a lower spatial density configuration of three micro-features per millimeter length, a smaller feature size of around 100 μm, and a 60-50 degrees pyramid angle.
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