Metal complexes for gas-phase thin-film deposition

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United States of America

PATENT NO 12091427
SERIAL NO

17599126

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Abstract

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Metal complexes of formula (I) are described:

description='In-line Formulae' end='lead'[M(L1)x(L2)y(hydra)z]n  formula (I)description='In-line Formulae' end='tail'

    wherein:M=metal atom having an atomic number selected from the ranges a) through c): a) 12, 21 to 34, with the exception of 30,b) 39 to 52, with the exception of 48,c) 71 to 83, with the exception of 80, L1=neutral or anionic ligand, with x=0 or 1,L2=neutral or anionic ligand, with y=0 or 1,(hydra)=acetone dimethylhydrazone monoanion, with z=1, 2, or 3,n=1 or 2, andthe total charge of the complex is 0.

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UMICORE AG & CO KGRODENBACHER CHAUSSEE 4 HANAU-WOLFGANG 63457

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doppiu, Angelino Seligenstadt, DE 48 47
Frey, Annika Hanau, DE 23 15
Karch, Ralf Kleinostheim, DE 60 181
Rau, Nicholas Marburg, DE 7 0
Schorn, Wolf Waldbronn, DE 15 41
Schumann, Henrik Weinbach, DE 3 0
Sundermeyer, Joerg Marburg, DE 20 75
Woerner, Eileen Nidderau, DE 41 46

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