Bulk acoustic wave resonator with patterned mass loading layer and recessed frame

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United States of America

PATENT NO 12088278
SERIAL NO

17219525

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Abstract

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Aspects of this disclosure relate bulk acoustic wave resonators with a patterned mass loading layer at least contributing to a difference in mass loading between a main acoustically active region of the bulk acoustic wave resonator and a recessed frame region of the bulk acoustic wave resonator. Related methods of manufacturing can involve forming the patterned mass loading layer in the main acoustically active region and the recessed frame region in a common processing step such that the patterned mass loading layer has a higher density in the main acoustically active region than in the recessed frame region.

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Patent Owner(s)

  • SKYWORKS GLOBAL PTE. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hamaoka, Yosuke Suita, JP 32 111
Han, Jong Duk Yongin, KR 13 35
Lee, Jae Hyung Seoul, KR 76 333
Liu, Jiansong Irvine, US 56 241
Shin, Kwang Jae Yongin, KR 77 256
Shirakawa, Alexandre Augusto San Diego, US 41 259
Wang, Yiliu Irvine, US 68 143
Zhang, Benfeng Moriguchi, JP 11 32

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