Transversely-excited film bulk acoustic resonator package and method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12088270
APP PUB NO 20210044274A1
SERIAL NO

17067418

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Abstract

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Acoustic resonator devices and filters are disclosed. A piezoelectric plate is attached to a substrate, a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. A first conductor pattern is formed on a surface of the piezoelectric plate. The first conductor pattern includes interleaved fingers of an interdigital transducer disposed on the diaphragm, and a first plurality of contact pads. A second conductor pattern is formed on a surface of a base, the second conductor pattern including a second plurality of contact pads. Each pad of the first plurality of contact pads is connected to a respective pad of the second plurality of contact pads. A seal is formed between a perimeter of the piezoelectric plate and a perimeter of the base.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTDKYOTO JAPAN KYOTO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chung, Charles San Francisco, US 21 455
Eddy, Mike Santa Barbara, US 17 192
Kay, Andrew Irvine, US 81 835
Turner, Patrick San Bruno, US 141 3419
Yantchev, Ventsislav Sofia, BG 138 3509

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