Structure and formation method of fin-like field effect transistor
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United States of America Patent
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Sep 10, 2024
Grant Date -
Nov 3, 2022
app pub date -
Jul 15, 2022
filing date -
Jul 15, 2022
priority date (Note) -
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Abstract
A structure and a formation method of a semiconductor device are provided. The semiconductor device includes a semiconductor substrate and a fin structure over the semiconductor substrate. The semiconductor device also includes a gate stack covering a portion of the fin structure and an epitaxially grown source/drain structure over the fin structure and adjacent to the gate stack. The semiconductor device further includes a semiconductor protection layer over the epitaxially grown source/drain structure. The semiconductor protection layer has an atomic concentration of silicon greater than that of the epitaxially grown source/drain structure.
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