Method for producing a composite structure comprising a thin monocristalline layer on a carrier substrate

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United States of America Patent

PATENT NO 12087631
APP PUB NO 20220359293A1
SERIAL NO

17757797

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Abstract

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A method for producing a composite structure comprises providing a donor substrate including a single-crystal material, and a support substrate having a first alignment pattern on a face or edge of the support substrate. A heat treatment is applied at least to the donor substrate to bring about a surface reorganization on at least one face of the donor substrate. The surface reorganization results in formation of first steps of nanometric amplitude, which are parallel to a first main axis. The donor substrate and the support substrate are optically aligned, to better than ±0.1° between a locating mark indicating the first main axis on the donor substrate and at least one alignment pattern of the support substrate. The donor substrate and the support substrate are then assembled together, and a thin layer is transferred from the donor substrate onto the support substrate.

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Patent Owner(s)

Patent OwnerAddress
SOITECPARC TECHNOLOGIQUE DES FONTAINES CHEMIN DES FRANQUES 38190 BERNIN 38190

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gaudin, Gweltaz Crolles, FR 35 221

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