Baking chamber with shroud for mask clean

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United States of America Patent

PATENT NO 12085849
APP PUB NO 20220326608A1
SERIAL NO

17229584

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Embodiments of baking chambers are provided herein. In some embodiments, a baking chamber for baking a substrate includes: a chamber body enclosing an interior volume; a heater disposed in the interior volume, wherein the heater is configured to have a surface temperature of about 100 to about 400 degrees Celsius during use; a shroud disposed in the interior volume opposite the heater, wherein the shroud includes a central opening fluidly coupled to a gas inlet; a plurality of substrate lift pins configured to support a substrate in the interior volume between the heater and the shroud, wherein the shroud includes a plurality of first openings to facilitate the plurality of substrate lift pins; and a gas outlet disposed in the chamber body opposite the shroud such that a gas flow path through the interior volume extends from the gas inlet, around the heater, and to the gas outlet.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dagan, Eliyahu Shlomo Sunnyvale, US 12 1
Makhamreh, Khalid Los Gatos, US 28 194
Wu, Banqiu San Jose, US 64 1486

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