Design-assisted large field of view metrology

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United States of America Patent

PATENT NO 12085385
APP PUB NO 20230108539A1
SERIAL NO

17524152

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Abstract

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A metrology system may receive design data including a layout of fabricated instances of a structure on a sample. The system may further receive detection signals from the metrology tool associated within a field of view including multiple of the fabricated instances of the structure. The system may further generate design-assisted composite data for the structure by combining detection signals from one or more common features of the structure associated with the fabricated instances of the structure within the field of view using the design data. The system may further generate one or more metrology measurements of the structure based on the design-assisted composite data.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eyring, Stefan Weilburg, DE 17 65
Laske, Frank Weilburg, DE 21 116

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