Multi-depth film for optical devices

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United States of America Patent

PATENT NO 12084761
APP PUB NO 20230203647A1
SERIAL NO

18111385

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Abstract

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Embodiments of the present disclosure relate to forming multi-depth films for the fabrication of optical devices. One embodiment includes disposing a base layer of a device material on a surface of a substrate. One or more mandrels of the device material are disposed on the base layer. The disposing the one or more mandrels includes positioning a mask over of the base layer. The device material is deposited with the mask positioned over the base layer to form an optical device having the base layer with a base layer depth and the one or more mandrels having a first mandrel depth and a second mandrel depth.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Armstrong, Karl J Sunnyvale, US 17 145
Cohen, Brian Alexander Delmar, US 7 3
Godet, Ludovic Sunnyvale, US 327 3246
McMillan, Wayne San Jose, US 33 230
Riordon, Benjamin B Newburyport, US 39 494
Strassner, James D Austin, US 25 73

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