Micro-electro-mechanical-system structures and applications thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12084340
APP PUB NO 20220306451A1
SERIAL NO

17617917

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Abstract

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A Micro-Electro-Mechanical-System (MEMS) device and a method for operating the device are disclosed. The device includes a substrate platform and an electrode plate having a plurality of serpentine arms, the electrode plate attached to the substrate platform via the plurality of serpentine arms, the electrode plate provided on a plane in a resting position. The device includes a sharp member disposed substantially perpendicularly on the electrode plate. In various implementations, the electrode plate and the substrate platform are co-planar. In various implementations, the electrode plate is configured to move in a direction perpendicular to the plane away from the resting position. The device also includes a counter-electrode. The method of operating the device includes supplying, via a power source, a direct current (DC) across the electrode and the counter-electrode to generate an electrostatic field across the electrode and the counter-electrode of the device.

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Patent Owner(s)

Patent OwnerAddress
MEKONOS INC44 MONTGOMERY STREET FLOOR 17 SAN FRANCISCO CA 94104

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Banerjee, Arunava Steven San Mateo, US 6 4
Bousse, Luc Jan Los Altos, US 1 2
Webb, Mark A Berkeley, US 4 3

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