Inductively coupled plasma reactor and wire structure for antenna coil of inductively coupled plasma reactor
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United States of America Patent
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Sep 3, 2024
Grant Date -
May 4, 2023
app pub date -
Apr 21, 2021
filing date -
May 15, 2020
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Abstract
According to the present invention, provided is an inductively coupled plasma reactor including: a reaction chamber configured to provide a plasma reaction space; a ferrite core arranged to surround the plasma reaction space; and an antenna coil formed by winding a strip-shaped wire structure on the ferrite core, wherein the wire structure includes a plurality of electrically conductive wires and a covering made of a flexible material and configured to surround the plurality of electrically conductive wires.
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