Methods and devices for microelectromechanical resonators

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United States of America Patent

PATENT NO 12081192
APP PUB NO 20230308076A1
SERIAL NO

18324902

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Abstract

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A MEMS device may include: (i) a lower cavity, including a first island, formed within a first layer of the MEMS device; (ii) an upper cavity, including a second island, formed within a second layer of the MEMS device; (iii) a MEMS resonating element arranged in a device layer of the MEMS device and anchored via the first and second islands; (iv) a first set of electrodes for electrostatic actuation and sensing of the MEMS resonating element in an in-plane mode that is arranged in the device layer of the MEMS device; and (v) a second set of electrodes for electrostatic actuation and sensing of the MEMS resonating element in an out-of-plane mode that is electrically isolated from the first set of electrodes and located in the first or second layer of the MEMS device, and wherein the out-of-plane mode is a torsional mode or a saddle mode.

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Patent Owner(s)

Patent OwnerAddress
STATHERA IP HOLDINGS INC400 BOUL DE MAISONNEUVE OUEST SUITE 700 MONTREAL QUÉBEC H3A 1L4 H3A 1L4

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chodavarapu, Vamsy P Brossard, CA 2 127
Xereas, George Montreal, CA 10 11

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges9233601 - 100501001502002503003504004505005506006507007508008509009501000

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