Bonding method, bonding device, and holding member

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United States of America Patent

PATENT NO 12080554
APP PUB NO 20210225651A1
SERIAL NO

17225727

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Abstract

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A method for bonding a first substrate and a second substrate includes: forming a protrusion at a partial region of the first substrate; measuring a position of the first substrate after the protrusion is formed in the first substrate; and bonding the first substrate and the second substrate by contacting the protrusion of the first substrate with a surface of the second substrate to form a contact region and enlarging the contact region.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATIONTOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukuda, Minoru Tokyo, JP 128 1537
Kuwano, Ikuhiro Tokyo, JP 3 1
Maeda, Hidehiro Yokohama, JP 16 72
Mitsuishi, Hajime Yokohama, JP 26 55
Sugaya, Isao Kawasaki, JP 53 266
Tsunoda, Masaki Kamakura, JP 59 499

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