Multi-material thermionic electron emitters

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United States of America

PATENT NO 12080505
SERIAL NO

18404139

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Abstract

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The present disclosure can relate to a thermionic emission device. The thermionic emission device can include a substrate layer, an insulating layer deposited onto an uppermost surface of the substrate layer, and an electron emitting layer deposited onto an uppermost surface of the insulating layer. The electron emitting layer, the insulating layer, and the substrate layer each can include a first etching and a second etching oriented according to a photoresist pattern applied to an uppermost surface of the electron emitting layer. The first etching and the second etching can converge to form a cavity in the substrate layer beneath a beam suspended above the cavity. The beam can comprise an unetched region of the electron emitting layer and the insulating layer oriented between the first etching and the second etching.

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Patent Owner(s)

Patent OwnerAddress
ENGENIUSMICRO LLC1300 MERIDIAN STREET SUITE 3000 HUNTSVILLE AL 35801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bond,, III Arthur Gernt Auburn, US 2 1
Hamelin, Benoit Atlanta, US 9 58

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