Template, workpiece, and alignment method

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United States of America Patent

PATENT NO 12078922
APP PUB NO 20220308440A1
SERIAL NO

17472387

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A template of one embodiment includes an alignment mark. The alignment mark includes a first main pattern and a first auxiliary pattern. In the first main pattern, a first part and a second part are disposed according to a predetermined repeating pattern. The first auxiliary pattern is configured as a pattern opposite to the repeating pattern in a region outside an end of the first main pattern.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATION1-21 SHIBAURA 3-CHOME MINATO-KU TOKYO 108-0023

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mitsugi, Satoshi Kanagawa, JP 39 206
Sato, Takashi Kanagawa, JP 973 9680
Suto, Takeshi Kanagawa, JP 11 132

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