Optical interference filter with aluminum nitride layers

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United States of America Patent

PATENT NO 12078830
APP PUB NO 20230168418A1
SERIAL NO

17457123

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Abstract

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In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers includes an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers includes at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.

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Patent Owner(s)

Patent OwnerAddress
VIAVI SOLUTIONS INC1445 SOUTH SPECTRUM BLVD SUITE 102 CHANDLER AS 85286

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grigonis, Marius Santa Rosa, US 21 88
Hendrix, Karen Denise Santa Rosa, US 37 514
Ockenfuss, Georg J Santa Rosa, US 89 421
Shkabko, Andy Santa Rosa, US 3 0
Yang, Jinhui Santa Rosa, US 12 33

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