Connector for substrate support with embedded temperature sensors

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United States of America Patent

PATENT NO 12077862
APP PUB NO 20210047732A1
SERIAL NO

17088546

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Importance

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Abstract

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An electrical connector includes first, second, third, and fourth electrical conductors. The first, second, third, and fourth electrical conductors each include a first end to be electrically connected to a respective electrically conductive pad formed on a surface of a ceramic layer of a substrate support and a second end to be electrically connected to a respective wire within a through hole in the substrate support. The electrical connector also includes a retainer to hold the first, second, third, and fourth electrical conductors in place.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miller, Donald J Hayward, US 23 1094
Tian, Siyuan Fremont, US 22 49

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