Nanorod production method and nanorod produced thereby
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United States of America Patent
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Aug 27, 2024
Grant Date -
Feb 23, 2023
app pub date -
Sep 19, 2022
filing date -
Sep 19, 2022
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Abstract
Provided is a method of manufacturing a nanorod. The method comprising comprises the steps of: providing a growth substrate and a support substrate; epitaxially growing a nanomaterial layer onto one surface of the growth substrate; forming a sacrificial layer on one surface of the support substrate; bonding the nanomaterial layer with the sacrificial layer; separating the growth substrate from the nanomaterial layer; flattening the nanomaterial layer; forming a nanorod by etching the nanomaterial layer; and separating the nanorod by removing the sacrificial layer.
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