Rotating sample holder for random angle sampling in tomography

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United States of America Patent

PATENT NO 12074007
APP PUB NO 20230377835A1
SERIAL NO

18357904

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Abstract

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A sample holder retains a sample and can continuously rotate the sample in a single direction while the sample is exposed to a charged particle beam (CPB) or other radiation source. Typically, the CPB is strobed to produce a series of CPB images at random or arbitrary angles of rotation. The sample holder can rotate more than one complete revolution of the sample. The CPB images are used in tomographic reconstruction, and in some cases, relative rotation angles are used in the reconstruction, without input of an absolute rotation angle.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Franken, Erik Nuenen, NL 8 4
Janssen, Bart Jozef Eindhoven, NL 24 80
Verschueren, Edwin Mierlo, NL 10 4

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