Thin film sensor

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United States of America Patent

PATENT NO 12072250
APP PUB NO 20220316963A1
SERIAL NO

17709435

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Abstract

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A thin film sensor includes an insulating layer provided on a surface of a measurement target, and a sensor layer that is laminated on the insulating layer, and includes a plurality of regions partitioned by a groove that is provided by irradiation of a laser and penetrates in a thickness direction. Among the plurality of regions, at least one region corresponds to a sensor region that senses a pressure applied to the measurement target or a temperature of the measurement target, and other regions each correspond to a non-sensor region that does not sense a pressure applied to the measurement target or a temperature of the measurement target.

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Patent Owner(s)

Patent OwnerAddress
HONDA MOTOR CO LTDTOKYO JAPAN TOKYO METROPOLIS
GOTOH EDUCATIONAL CORPORATION1-10-7 DOGENZAKA SHIBUYA-KU TOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsumoto, Kenji Saitama, JP 328 4894
Mihara, Yuji Tokyo, JP 47 653

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