Methods and devices for microelectromechanical resonators

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United States of America Patent

PATENT NO 12071342
APP PUB NO 20230051438A1
SERIAL NO

17971781

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Abstract

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MEMS based sensors, particularly capacitive sensors, potentially can address critical considerations for users including accuracy, repeatability, long-term stability, ease of calibration, resistance to chemical and physical contaminants, size, packaging, and cost effectiveness. Accordingly, it would be beneficial to exploit MEMS processes that allow for manufacturability and integration of resonator elements into cavities within the MEMS sensor that are at low pressure allowing high quality factor resonators and absolute pressure sensors to be implemented. Embodiments of the invention provide capacitive sensors and MEMS elements that can be implemented directly above silicon CMOS electronics.

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Patent Owner(s)

Patent OwnerAddress
NXTSENS MICROSYSTEMS INC700-400 BOUL DE MAISONNEUVE O MONTRÉAL QUÉBEC H3A 1L4 H3A 1L4

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chodavarapu, Vamsy Brossard, CA 19 89
Xereas, George Montreal, CA 10 11

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