Micromechanical structure and method of providing the same

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United States of America

PATENT NO 12071338
SERIAL NO

17459073

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Abstract

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A micromechanical structure has a first micromechanical element, a second micromechanical element and a torsion spring arrangement having a first torsion spring element, having a first center line, mechanically connected to the first micromechanical element at a first contact region and to the second micromechanical element at a second contact region, and having a second torsion spring element, having a second center line, mechanically connected to the first micromechanical member at a third contact region and to the second micromechanical member at a fourth contact region in order to connect the first micromechanical member and the second micromechanical member to be movable relative to each other. A distance between the first and second center lines, starting from the first and third contact regions toward the second and fourth contact regions, decreases in a first portion and increases in a second portion. In a rest position of the micromechanical structure, the first and second torsion spring elements are arranged without contact to each other.

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Patent Owner(s)

Patent OwnerAddress
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E VHANSASTRASSE 27C MUNICH 80686

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Drabe, Christian Dresden, DE 16 99
Kaiser, Bert Dresden, DE 15 32

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges7370374301 - 1011 - 200500100015002000250030003500400045005000550060006500700075008000

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