Liquid processing apparatus and liquid processing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12070769
APP PUB NO 20230234091A1
SERIAL NO

18129150

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A liquid processing apparatus includes: a tank configured to store a processing liquid supplied from a processing liquid supply source; a circulation passage connected to the tank; a pump installed at the circulation passage; a plurality of liquid processors configured to perform liquid processing on a substrate; and a plurality of supply passages configured to supply the processing liquid to the plurality of liquid processors respectively, wherein the circulation passage includes a main passage portion provided with the pump, and a first branch passage portion and a second branch passage portion branching from the main passage portion, and the processing liquid flowing out from the tank passes through the main passage portion, then flows into the first branch passage portion and the second branch passage portion, and then returns to the tank through the first branch passage portion and the second branch passage portion.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Horiguchi, Ryoichi Koshi, JP 2 1
Itahashi, Takuya Koshi, JP 3 1
Nobukuni, Chikara Koshi, JP 5 4
Ojima, Tomoaki Koshi, JP 3 6
Wakayama, Shota Koshi, JP 3 1

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