Substrate cleaning solution, and using the same, method for manufacturing cleaned substrate and method for manufacturing device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12068150
SERIAL NO

17312829

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

[Problem] To obtain a substrate cleaning solution capable of cleaning a substrate and removing particles.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
MERCK PATENT GMBH64293 DARMSTADT

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Horiba, Yuko Kakegawa, JP 3 0
Kinuta, Takafumi Kakegawa, JP 12 26
Nagahara, Tatsuro Kakegawa, JP 38 144

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Feb 20, 2028
7.5 Year Payment $3600.00 $1800.00 $900.00 Feb 20, 2032
11.5 Year Payment $7400.00 $3700.00 $1850.00 Feb 20, 2036
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00