MEMS device with tiltable structure and improved control

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12066621
APP PUB NO 20220334378A1
SERIAL NO

17720506

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Abstract

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A MEMS device includes a semiconductor body with a cavity and forming an anchor portion, a tiltable structure elastically suspended over the cavity, first and second support arms to support the tiltable structure, and first and second piezoelectric actuation structures biasable to deform mechanically, generating a rotation of the tiltable structure around a rotation axis. The piezoelectric actuation structures carry first and second piezoelectric displacement sensors. When the tiltable structure rotates around the rotation axis, the displacement sensors are subject to respective mechanical deformations and generate respective sensing signals in phase opposition to each other, indicative of the rotation of the tiltable structure. The sensing signals are configured to be acquired in a differential manner.

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Patent Owner(s)

  • STMICROELECTRON S.R.L.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barbieri, Andrea Casalpusterlengo, IT 23 77
Boni, Nicolo' Albino, IT 32 18
Carminati, Roberto Piancogno, IT 67 148
Molinari, Luca Piacenza, IT 17 108
Zamprogno, Marco Cesano Maderno, IT 48 236

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