Raman spectroscopy based measurements in patterned structures

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United States of America Patent

PATENT NO 12066385
APP PUB NO 20220326159A1
SERIAL NO

17694782

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Abstract

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A method for use in measuring one or more characteristics of patterned structures, the method including providing measured data comprising data indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of at least one of illuminating and collected light conditions corresponding to the one or more characteristics to be measured, processing the measured data, and determining, for each of the at least one Raman spectrum, a distribution of Raman-contribution efficiency (RCE) within at least a part of the structure under measurements, being dependent on characteristics of the structure and the predetermined configuration of the at least one of illuminating and collected light conditions in the respective optical measurement scheme, and analyzing the distribution of Raman-contribution efficiency and determining the one or more characteristics of the structure.

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Patent Owner(s)

Patent OwnerAddress
NOVA MEASURING INSTRUMENTS LTDWEIZMANN SCIENCE PARK P O BOX 266 REHOVOT 76100

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barak, Gilad Rehovot, IL 63 476
Hainick, Yanir Tel-Aviv, IL 23 34
Machavariani, Vladimir Rehovot, IL 18 167
Oren, Yonatan Kiryat Ono, IL 23 20

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