Lanthanoid compound, lanthanoid-containing thin film and formation of lanthanoid-containing thin film using the lanthanoid compound

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United States of America Patent

PATENT NO 12065453
APP PUB NO 20210061833A1
SERIAL NO

16964811

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Abstract

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The lanthanoid compound according to the present invention is a compound represented by the following general formula Ln(R1xCp)2(A)y or the following general formula Sm(R2xCp)2(A)y. In Ln(R1xCp)2(A)y, Ln is Nd, Eu, Dy, Tm, or Yb, R1 is independently Me, Et, nPr, iPr, nBt, sBu, iBu, or tAm, Cp is cyclopentadienyl, A is a linear or cyclic hydrocarbon containing oxygen, sulfur, phosphorus, or nitrogen, x is an integer of 2 to 3, and y is 0 to 2. In Sm(R2xCp)2(A)y, R2 is independently nPr, iPr, nBt, sBu, iBu, or tAm.

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Patent Owner(s)

  • L'AIR LIQUIDE, SOCIÉTÉ ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCÉDÉS GEORGES CLAUDE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dussarrat, Christian Tokyo, JP 139 7373
Ono, Takashi Yokosuka, JP 389 4413
Seki, Tomohiro Yokosuka, JP 19 100

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