Bonding systems, and methods of providing a reducing gas on a bonding system

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United States of America Patent

PATENT NO 12062636
APP PUB NO 20230326903A1
SERIAL NO

18123166

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Abstract

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A bonding system is provided. The bonding system includes (a) a bond head assembly configured for carrying a bonding tool for bonding a semiconductor element to a substrate and (b) a reducing gas conduit for carrying a reducing gas from (i) a reducing gas source to (ii) a bonding area of a bonding system. The reducing gas is configured for use during bonding of the semiconductor element to the substrate at the bonding area. The reducing gas conduit includes a catalyst for producing excess reducing species in the reducing gas prior to the reducing gas reaching the bonding area.

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Patent Owner(s)

Patent OwnerAddress
KULICKE AND SOFFA INDUSTRIES INC1005 VIRGINIA DRIVE CHRISTOPHER M SPLETZER SR FORT WASHINGTON PA 19034

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bajwa, Adeel Ahmad Fort Washington, US 11 12
Colosimo,, Jr Thomas J Fort Washington, US 25 68
Wasserman, Matthew B Fort Washington, US 24 92

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