Fluorine-free tungsten ALD for dielectric selectivity improvement

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12062545
SERIAL NO

17339454

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Methods of forming metallic tungsten films selectively on a conductive surface relative to a dielectric surface are described. A substrate is exposed to a first process condition to deposit a tungsten-containing film that is substrate free of tungsten metal. The tungsten-containing film is then converted to a metallic tungsten film by exposure to a second process condition.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CALIFORNIA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Shih Chung Cupertino, US 48 518
Chen, Wen Ting San Jose, US 4 1
Fisher, Ilanit San Jose, US 8 239
Gandikota, Srinivas Santa Clara, US 214 6856
Lin, Chi-Chou San Jose, US 44 150
Ren, He San Jose, US 81 1752
Shen, Chenfei San Jose, US 5 1
Sriram, Mandyam San Jose, US 77 7695
Wu, Kedi Fremont, US 15 23
Yoshida, Naomi Sunnyvale, US 60 1078

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Feb 13, 2028
7.5 Year Payment $3600.00 $1800.00 $900.00 Feb 13, 2032
11.5 Year Payment $7400.00 $3700.00 $1850.00 Feb 13, 2036
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00