Methods and systems for cooling plasma treatment components

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12062523
APP PUB NO 20230260758A1
SERIAL NO

17670670

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Abstract

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Methods and systems for uniformly cooling a dome within a plasma treatment system are disclosed. The methods and systems utilize a diffuser including a perforated plate and a cone. The perforated plate includes a center portion and multiple arrays of holes with each array being located circumferentially at a different distance from the center. The cone extends away from the center. The diffuser spreads cooling gas more uniformly across the surface of the dome.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANYNO 8 LI-HSIN RD 6 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU 300-77

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Jr-Sheng Hsinchu, TW 15 6
Cheng, Chung-Hsiu Banqiao, TW 7 10
Hsu, Chih-Hsien Hsinchu, TW 32 179
Lee, Chou-Feng Hsinchu, TW 6 5
Tso, Cheng Kuang Hsinchu, TW 3 0

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