Modeling method of flicker noise of small-sized semiconductor device

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United States of America

PATENT NO 12061849
SERIAL NO

18617419

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A modeling method of flicker noise of small-sized semiconductor device is provided, which includes steps of measuring flicker noise of the small-sized semiconductor device under different gate voltages to obtain device noise data; separating noise obtained by testing under the different gate voltages in frequency domain, to obtain noise spectrums resulted from Random Telegraph Noise (RTN) defects and a noise spectrum resulted from mobility fluctuation; processing the noise spectrums resulted from the changes of the charged states of the RTN defects to obtain Svg,I; processing the noise spectrum resulted from the mobility fluctuation to obtain Sid,II/III; and obtaining a total current noise intensity model, which is expressed as: Sid=Sid,I+Sid,II/III.

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SHANGHAI JIAO TONG UNIVERSITY200000 800 DONGCHUAN ROAD MINHANG DISTRICT SHANGHAI SHANGHAI CITY SHANGHAI CITY 200000

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ji, Zhigang Shanghai, CN 19 17
Ren, Pengpeng Shanghai, CN 2 0

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