Active matrix programmable mirror

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12061331
SERIAL NO

17207433

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Microelectromechanical system (MEMS) devices, methods of operating the MEMS device, and methods of manufacturing the MEMS device are disclosed. In some embodiments, the MEMS device includes a glass substrate; an electrode on the glass substrate; a hinge mechanically coupled to the electrode; a membrane mirror mechanically coupled to the hinge; a TFT on the glass substrate and electrically coupled to the electrode; and a control circuit comprising: a multiplexer configured to turn on or turn off the TFT; and a drive source configured to provide a drive signal for charging the electrode through the TFT. An amplitude of the drive signal corresponds to an amount of charge, and the amount of charge generates an electrostatic force for actuating the hinge and a portion of the membrane mirror mechanically coupled to the hinge.

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Patent Owner(s)

Patent OwnerAddress
OBSIDIAN SENSORS INC5754 PACIFIC CENTER BLVD SUITE 201 SAN DIEGO CA 92121

International Classification(s)

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  • 2021 Application Filing Year
  • B81C Class
  • 283 Applications Filed
  • 131 Patents Issued To-Date
  • 46.29 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andrews, Sean San Diego, US 11 8
Chan, Edward San Diego, US 45 753
Chang, Tallis San Diego, US 19 34
Hong, John San Diego, US 55 1227
Shin, Heesun San Diego, US 23 259
Wen, Bing San Diego, US 65 270

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Patent Citation Ranking

  • 0 Citation Count
  • B81C Class
  • 0 % this patent is cited more than
  • 1 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges9000.511.522.533.544.555.566.577.588.599.5

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