Active matrix programmable mirror
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Aug 13, 2024
Grant Date -
N/A
app pub date -
Mar 19, 2021
filing date -
Mar 19, 2021
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Microelectromechanical system (MEMS) devices, methods of operating the MEMS device, and methods of manufacturing the MEMS device are disclosed. In some embodiments, the MEMS device includes a glass substrate; an electrode on the glass substrate; a hinge mechanically coupled to the electrode; a membrane mirror mechanically coupled to the hinge; a TFT on the glass substrate and electrically coupled to the electrode; and a control circuit comprising: a multiplexer configured to turn on or turn off the TFT; and a drive source configured to provide a drive signal for charging the electrode through the TFT. An amplitude of the drive signal corresponds to an amount of charge, and the amount of charge generates an electrostatic force for actuating the hinge and a portion of the membrane mirror mechanically coupled to the hinge.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
OBSIDIAN SENSORS INC | 5754 PACIFIC CENTER BLVD SUITE 201 SAN DIEGO CA 92121 |
International Classification(s)

- 2021 Application Filing Year
- B81C Class
- 283 Applications Filed
- 131 Patents Issued To-Date
- 46.29 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Andrews, Sean | San Diego, US | 11 | 8 |
# of filed Patents : 11 Total Citations : 8 | |||
Chan, Edward | San Diego, US | 45 | 753 |
# of filed Patents : 45 Total Citations : 753 | |||
Chang, Tallis | San Diego, US | 19 | 34 |
# of filed Patents : 19 Total Citations : 34 | |||
Hong, John | San Diego, US | 55 | 1227 |
# of filed Patents : 55 Total Citations : 1227 | |||
Shin, Heesun | San Diego, US | 23 | 259 |
# of filed Patents : 23 Total Citations : 259 | |||
Wen, Bing | San Diego, US | 65 | 270 |
# of filed Patents : 65 Total Citations : 270 |
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Patent Citation Ranking
- 0 Citation Count
- B81C Class
- 0 % this patent is cited more than
- 1 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Feb 13, 2028 |
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Feb 13, 2032 |
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Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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