Systems and methods of electron beam induced processing

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United States of America Patent

PATENT NO 12059698
APP PUB NO 20230158520A1
SERIAL NO

18158666

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Abstract

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Embodiments of the present disclosure provide for methods and systems for making structures using an electrospray system while under vacuum. In particular, embodiments of the present disclosure provide for methods and systems for ultra-fast growth of high aspect ratio nano/meso/micro-structures with three dimensional topological complexity and control of phase and composition of the structure formed.

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Patent Owner(s)

Patent OwnerAddress
GEORGIA TECH RESEARCH CORPORATION926 DALNEY STREET NW ATLANTA GA 30318

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fedorov, Andrei G Atlanta, US 51 602

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