Feedback loop for controlling a pulsed voltage waveform

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United States of America Patent

PATENT NO 12057292
APP PUB NO 20230326717A1
SERIAL NO

18201358

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Abstract

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Embodiments of this disclosure describe a feedback loop that can be used to maintain a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate. The system described herein consequently enables a precise control over the shape of IEDF and the profile of the features formed in the surface of the substrate.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dhindsa, Rajinder Pleasanton, US 259 11448
Dorf, Leonid San Jose, US 74 1603
Kamenetskiy, Evgeny Santa Clara, US 14 157
Luere, Olivier Sunnyvale, US 44 1750
Plotnikov, Viacheslav San Jose, US 6 139
Rogers, James Los Gatos, US 130 2190

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