Systems and methods of clamp compensation

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12057286
APP PUB NO 20230120177A1
SERIAL NO

18084430

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element, determining a first displacement of the mover element, and determining a first compensation signal based at least in part on the first displacement. The method can further comprise applying the first compensation signal to the drive unit shear elements and the clamp element drive signal to the drive unit clamp element and determining a second displacement of the mover element. If the second displacement is less than a preselected threshold, the first compensation signal can be combined with an initial shear element drive signal to produce a modified shear element drive signal. If the second displacement is greater than the preselected threshold, a second compensation signal can be determined.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tacx, Paul Roermond, NL 5 1
Verschueren, Edwin Mierlo, NL 10 4

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