Thin-film crystalline structure with surfaces having selected plane orientations

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United States of America

PATENT NO 12057147
SERIAL NO

17511741

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A method of forming a thin film structure involves performing one or more repetitions to form a template on a wafer. The repetitions include: depositing a layer of a template material to a first thickness T1; and ion beam milling the layer of the template material to remove thickness T2, where T2

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Patent Owner(s)

Patent OwnerAddress
SEAGATE TECHNOLOGY LLCCUPERTINO CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kautzky, Michael Christopher Eagan, US 56 1498
Wan, Li Eden Prairie, US 73 409
Zhao, Tong Eden Prairie, US 226 3549

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