Method for imaging a region of interest of a sample using a tomographic X-ray microscope, microscope, system and computer program

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United States of America

PATENT NO 12056894
SERIAL NO

17470695

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Abstract

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A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT INC - DUBLIN5300 CENTRAL PARKWAY DUBLIN CA 94568

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Broderick, Wayne Pleasanton, US 2 0
Candell, Susan Lafayette, US 6 25
Case, Thomas Anthony Walnut Creek, US 8 151
Gu, Allen Pleasanton, US 2 0
Kotwal, Naomi Dublin, US 3 4
Lechner, Lorenz San Ramon, US 12 27

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