Multi-function overlay marks for reducing noise and extracting focus and critical dimension information

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United States of America Patent

PATENT NO 12055860
APP PUB NO 20240012340A1
SERIAL NO

18366097

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Abstract

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An overlay mark includes a first, a second, a third, and a fourth component. The first component is located in a first region of the first overlay mark and includes a plurality of gratings that extend in a first direction. The second component is located in a second region of the first overlay mark and includes a plurality of gratings that extend in the first direction. The third component is located in a third region of the first overlay mark and includes a plurality of gratings that extend in a second direction different from the first direction. The fourth component is located in a fourth region of the first overlay mark and includes a plurality of gratings that extend in the second direction. The first region is aligned with the second region. The third region is aligned with the fourth region.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fang, Yu-Piao Tainan, TW 17 21
Huang, Te-Chih Hsinchu, TW 30 286
Lee, Yu-Ching Kaohsiung, TW 50 82

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