Probe card, apparatus and method for detecting contact force of probe card
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United States of America Patent
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Aug 6, 2024
Grant Date -
Mar 2, 2023
app pub date -
Aug 30, 2021
filing date -
Aug 30, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
An apparatus is provided. The apparatus includes a stage and a plate disposed on the stage. The apparatus further includes a pressure film sensor that is formed on the plate and configured to detect a contact force between a plurality of needles on a probe head of a probe card and the pressure film sensor. The apparatus still includes a distance detector that is configured to detect a distance between the pressure film sensor and the needles. In addition, the apparatus includes an adjustment driver that is configured to adjust the probe card based on the detected contact force of the pressure film sensor.
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