Material processing apparatus and operating method thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12051600
SERIAL NO

17202370

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Abstract

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A material processing apparatus including a processing chamber, an external pressure source, a pressure reducer, a temperature regulator, and a controller is provided. The processing chamber has an internal space. The external pressure source is connected to the processing chamber to pressurize the internal space. The pressure reducer is connected to the processing chamber to depressurize the internal space. The temperature regulator is arranged in the processing chamber to adjust the temperature in the internal space. The controller is configured to control the external pressure source and the temperature regulator to respectively increase the temperature to a first predetermined temperature and the pressure to a first predetermined pressure, and to control the pressure in the processing chamber to rise continuously before the temperature in the processing chamber rises to the first predetermined temperature. An operating method of a material processing apparatus is further provided.

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Patent Owner(s)

Patent OwnerAddress
LIU SHAO CHINot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Shao-Chi Kaohsiung, TW 3 1

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