Waterproof MEMS button device, input device comprising the MEMS button device and electronic apparatus

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United States of America Patent

PATENT NO 12050102
APP PUB NO 20210095949A1
SERIAL NO

17025977

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Abstract

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A button device includes a MEMS sensor having a MEMS strain detection structure and a deformable substrate configured to undergo deformation under the action of an external force. The MEMS strain detection structure includes a mobile element carried by the deformable substrate via at least a first and a second anchorage, the latter fixed with respect to the deformable substrate and configured to displace and generate a deformation force on the mobile element in the presence of the external force; and stator elements capacitively coupled to the mobile element. The deformation of the mobile element causes a capacitance variation between the mobile element and the stator elements. Furthermore, the MEMS sensor is configured to generate detection signals correlated to the capacitance variation.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R LITALY BRIANZA MONZA MONZA AND BRIANZA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Duqi, Enri Milan, IT 56 120
Gattere, Gabriele Castronno, IT 52 66
Valzasina, Carlo Gessate, IT 57 209

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