Atomic layer process printer

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United States of America Patent

PATENT NO 12049700
APP PUB NO 20220307133A1
SERIAL NO

17616165

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Abstract

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The invention relates to an atomic layer process printer for material deposition, etching and/or cleaning on an atomic scale in a selective area. The invention further relates to a method for material deposition, etching and/or cleaning on an atomic scale in a selective area using the atomic layer process printer.

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Patent Owner(s)

Patent OwnerAddress
ATLANT 3D NANOSYSTEMS APSC/O MAKSYM PLAKHOTNYUK MÅRKÆRVEJ 2B TAASTRUP 2630

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anja, Boisen Kgs. Lyngby, DK 1 0
Bachmann, Julien Erlangen, DE 3 43
Fröhlich, Karol Bratislava, SK 1 0
Hansen, Ole Hørsholm, DK 42 530
Kundrata, Ivan Bratislava, SK 1 0
Plakhotnyuk, Maksym Kgs. Lyngby, DK 1 0
Rindzevicius, Tomas Malmó, SE 4 1

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