Compositions and methods using same for deposition of silicon-containing film

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United States of America Patent

PATENT NO 12049695
APP PUB NO 20190017167A1
SERIAL NO

16134410

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Compositions for forming a silicon-containing film such as without limitation a silicon oxide, silicon nitride, silicon oxynitride, a carbon-doped silicon nitride, or a carbon-doped silicon oxide film on at least a surface of a substrate having a surface feature. In one aspect, the composition comprises at least one compound is selected from the group consisting of a siloxane, a trisilylamine-based compound, and a cyclic trisilazane compound.

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Patent Owner(s)

  • VERSUM MATERIALS US, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Entley, William Robert Tempe, US 20 66
Lehmann, John Francis Tempe, US 8 37
Lei, Xinjian Tempe, US 203 13409
Ridgeway, Robert Gordon Tempe, US 48 1333
Vrtis, Raymond Nicholas Tempe, US 77 5701
Xiao, Manchao Tempe, US 139 13591

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