Electrostatic chuck, focus ring, support base, plasma processing apparatus, and plasma processing method

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United States of America Patent

PATENT NO 12046457
APP PUB NO 20210366694A1
SERIAL NO

16644009

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Abstract

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An electrostatic chuck according to an exemplary embodiment includes a first region and a second region. The first region has a first upper surface. The first region is configured to hold a substrate disposed on the first upper surface. The second region has a second upper surface. The second region extends in a circumferential direction to surround the first region. The second region is configured to support a focus ring mounted on the second upper surface. The first upper surface and the second upper surface extend along a single flat surface. The first region and the second region provide a space therebetween to separate the first upper surface and the second upper surface from each other.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 ?1076325

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsuyama, Shoichiro Miyagi, JP 45 1101
Sasaki, Yasuharu Miyagi, JP 99 2172
Uchida, Yohei Miyagi, JP 37 745

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